AutoProbe™ 300
Fully automated
Fast & easy TEM sample prep
In-situ lift-out
XYZ position recall
100nm resolution standard
In-situ probe tip exchange
Includes Short-Cut™ accessory
Summary
The AutoProbe™ 300 represents Omniprobe's 8th generation of nanomanipulator systems. It incorporates Omniprobe's newest technological developments to improve FIB utilization and provide high throughput performance, even for sophisticated procedures. The core of the AutoProbe™ 300 is an AutoProbe™ 200 which has been enhanced with the in-situ probe tip exchange feature. This feature allows the user to obtain a new probe needle without having to break system vacuum. Probe needles are held in a custom cassette which is shuttled into and out of the vacuum chamber through the sample load lock.
Another component of the AutoProbe™ 300 integrated solution is the external Short-Cut™ tool. The Short-Cut™ tool enables ex-situ attachment of the lift-out sample to a TEM grid. This step greatly improves FIB utilization since the former in-situ grid attach step is eliminated. The Short-Cut™ ex-situ sample attach process is simple and reliable. Lift-out samples are first attached to the probe needles using Omniprobe's patented Total Release™ lift-out method. The probe needle is then re-deposited into the aforementioned cassette, which is shuttled out of the FIB and presented to the Short-Cut™ tool. With the simple push of a button, the probe needle, with lamella attached, is automatically aligned and transferred to a TEM grid. Meanwhile the FIB, which formally performed this function, has been freed up and can be used for other FA tasks.
*Use of this device may be covered by U.S. Pat. No. 6570170 and other patents.
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