Selected Publications
Customer Publications
TEM Sample Preparation
FIB Lift-Out for Defect Analysis
L.A. Giannuzzi et al., Microelectronic Failure Analysis Desk Reference, 2002 Supplement, ASM International, pp.24-35
"In-Situ Lift-Out FIB Preparation for TEM Analysis of Magnetic Materials"
B.W. Kempshall’ et al., Microscopy and Microanalysis 8 (2), 2002, p. 390-391
"Target Preparation of Samples for 3D-TEM Using Micromanipulators"
Y. Ritz et al., Practical Metallography 4 (2004) 180-189
Atom Probe Sample Preparation
"In Situ Site-specific Specimen Preparation for Atom Probe Tomography"
K. Thompson et al., Ultramicroscopy, Volume 107, Issues 2-3, February-March 2007, Pages 131-139
LEAP Tomography and the Rapidly Expanding World of Microelectronic Applications
T.F. Kelly, 2007 International Conference on Frontiers of Characterization and Metrology for Nanoelectronics
Combined Electrical/Mechanical Testing
"Mechanical and Electrical Characterization of an IC Bond Pad Stack Using a Novel In-situ Methodology"
C.D. Hartfield et al., Proceedings from the 29th International Symposium for Testing and Failure Analysis, 2003, p. 486-495
"A Novel In-situ Methodology to Characterize Bond Pad and Dielectric Mechanical Behavior during Wafer Level Test"
C.D. Hartfield et al., presented at the 2003 Southwest Test Workshop
[Winner of "Best Technical Presentation"]
Omniprobe Publications
The Total Release Method for FIB In-Situ TEM Sample Preparation
T.M. Moore, Microscopy Today, V.13, No.4, pp.40-41, July 2005
Feedback Control of Gas Chemistry Reactions in the FIB
L. Zaykova-Feldman and T.M. Moore, Microsc. Microanal. 11 (Suppl 2) pp. 824-825CD 2005
Mechanical Conversion for High-Throughput TEM Sample Preparation
L. Zaykova-Feldman and T.M. Moore, Microsc. Microanal. 11 (Suppl 2) pp. 838-839CD 2005
The Total Release Method for FIB In-situ TEM Sample Preparation
L. Zaykova-Feldman and T.M. Moore, Microsc. Microanal. 11 (Suppl 2) pp. 848-849CD 2005
Mechanical Conversion for High-Throughput TEM Sample Preparation
Anthony B. Kendrick, Thomas M. Moore, Lyudmila Zaykova-Feldman, Journal of Physics: Conference Series 2005
Nanomechanical Characterization in the FIB
T.M. Moore, Proc. ISTFA 2005, pp. 209-211, 2005.
Mechanical Conversion for High Through-Put TEM Sample Preparation
T. Kendrick, T. Moore, L. Zaykova-Feldman, SEM-FIB Solutions